[K202-4am-09]Analysis and determination of rate coefficients of elementary reactions in the growth mechanism of silicon crystals
○Mana Ishizuka1, Katsunori Yamaguchi1, Nilson Kunioshi1(1. Waseda University)
[Lang.] Japanese
Keywords:
Reaction Dynamics,Chemical Vapor Deposition,Simulation,Quantum chemical calculation,Transition State Theory
