The 103rd CSJ Annual Meeting

The 103rd CSJ Annual Meeting

Mar 22 - Mar 25, 2023Tokyo University of Science
CSJ Annual Meeting
The 103rd CSJ Annual Meeting

The 103rd CSJ Annual Meeting

Mar 22 - Mar 25, 2023Tokyo University of Science

[K202-4am-09]Analysis and determination of rate coefficients of elementary reactions in the growth mechanism of silicon crystals

Mana Ishizuka1, Katsunori Yamaguchi1, Nilson Kunioshi1(1. Waseda University)
[Lang.] Japanese

Keywords:

Reaction Dynamics,Chemical Vapor Deposition,Simulation,Quantum chemical calculation,Transition State Theory