International Conference on Materials and Systems for Sustainability 2025（ICMaSS2025）
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Fri. Dec 12, 2025
Sat. Dec 13, 2025
Sun. Dec 14, 2025
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9:30 AM - 10:00 AM JST
(12:30 AM - 1:00 AM UTC)
[NNS-1-02]
Sputter Epitaxy of Superconducting NbN and Ferroelectric ScAlN on Nitride Semiconductors
*Atsushi Kobayashi
1
(1. Tokyo University of Science)
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