The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-21][Invited] Tight-Binding Quantum Chemical Molecular Dynamics Simulations on Atomistic Mechanism of Plasma Etching Processes
Momoji Kubo(Tohoku University)