The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-24]Stochastic Simulation of Development Process in Electron Beam Lithography
Bunta Inoue (1), Masanori Koyama (1), Atsushi Sekiguchi (2), Masamitsu Shirai (1), Yoshihiko Hirai (1), Masaaki Yasuda (1)((1) Osaka Prefecture University, (2) Litho Tech Japan)