The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-25]Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask
Tomoaki Osumi, Akio Misaka, Kousuke Sato, Masaaki Yasuda, Masaru Sasago, Yoshihiko Hirai(Osaka Prefecture University)