The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-29]Progress and Outlook towards High-NA EUV Materials
Jara G. Santaclara (1), Gijsbert Rispens (1), Joost Bekaert (2), Arame Thiam (2), Mark Maslow (1), Rik Hoefnagels (1)((1) ASML, (2) IMEC)