The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology

The 38th International Conference of Photopolymer Science and Technology

Jun 15 - Jul 14, 2021Online

[A-32][Invited] Novel EUV Resist Materials with Improved Stochastics - A Progress Report

Florian Gstrein(Intel)
30min.