The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-34][Invited] Randomness of Polymer Microstructure in the Resist Film as Shot Noise
Makoto Muramatsu (1), Satoru Shimura (2), Arisa Hara (2)((1) Advanced Technology Development Department, Tokyo Electron Kyushu, (2) Process Technology Department, Tokyo Electron Kyushu)
30min.