The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-35]Surface Variation Characterization on Chemical Amplified Photoresist for Extreme Ultraviolet Lithography Stochastic Effects
Eric C. Liu, Amir Hegazy, Hyeonseon Choi, Robert Brainard, Gregory Denbeaux(State University of New York, Polytechnic Institute)