The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-36]Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement
Shinji Yamakawa (1), Ako Yamamoto (1), Seiji Yasui (2), Takeo Watanabe (1), Tetsuo Harada (1)((1) University of Hyogo, (2) San-Apro)