The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-37][Invited] New Approaches to EUV Photoresists: Expanding the Polymer Toolbox
Jingyuan Deng (1), Florian Kaefer (2), Sean Bailey (2), Yusuke Otsubo (2,3), 〇Christopher K. Ober (2)((1) Department of Chemistry and Chemical Biology, Cornell University, (2) Department of Materials Science & Engineering, Cornell University, (3) JSR)
30min.