The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-38][Invited] Multi-Trigger Resist for EUV Lithography
C. Popescu (1), G. O'Callaghan (1), A. McClelland (1), J. Roth (2), T. Lada (2), T. Kudo (3), R. Dammel (3), M. Moinpour (3), Y. Cao (3), 〇A.P.G. Robinson (1)((1) Irresistible Materials, (2) Nano-C, (3) EMD Performance Materials)
30min.