The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-41]Progress in EUV Photoresists for High-Resolution Patterning
Yusuke Otsubo (1,2), Hong Xu (1), Emmanuel P. Giannelis (1), Christopher K. Ober (1)((1) Cornell University, (2) JSR)