The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-42][Invited] Study on Irradiation Effects by Femtosecond-pulsed Extreme Ultraviolet in Resist Materials
Hiroki Yamamoto, Yuji Hosaka, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Yasunari Maekawa(National Institutes for Quantum and Radiological Science and Technology (QST))
30min.