The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-44]Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists
Roberto Fallica (1), Stefano Nannarone (2), Nicola Mahne (2), Andrea Marco Malvezzi (2), Danilo De Simone (1)((1) IMEC, (2) CNR-IOM synchrotron beamline BEAR (Elettra synchrotron))