The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-45]The Measurement of the Refractive Index n and k Value of the EUV Resist by EUV Reflectivity Measurement Method
Yosuke Ohta (1), Jun Sekiguchi (1), Shota Niihara (2), Tetsuo Harada (2), Takeo Watanabe (2)((1) Litho Tech Japan, (2) University of Hyogo)