[A-46][Invited] Resin Deformation Analysis in UV Imprint Considering UV Shrinkage, Thermal Deformation, and Thermochemical Kinetics
Yuki Onishi (1), Ryunosuke Yamashita (1), Kenji Amaya (1), Yoshihiko Hirai (2)((1) Tokyo Institute of Technology, (2) Osaka Prefecture University)
30min.