The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
The 38th International Conference of Photopolymer Science and Technology
Jun 15 - Jul 14, 2021Online
[A-84]Polymerizable Olefins Groups in Antimony EUV Photoresists
Michael Murphy, Nitinkumar S. Upadhyay, Munsaf Ali, James Passarelli, Jodi
Grzeskowiak, Maximillian Weires, Robert L. Brainard(State University of New York, Polytechnic Institute)
Grzeskowiak, Maximillian Weires, Robert L. Brainard(State University of New York, Polytechnic Institute)