The 39th International Conference of Photopolymer Science and Technology
Jun 28 - Jun 30, 2022Online Meeting
The 39th International Conference of Photopolymer Science and Technology
Jun 28 - Jun 30, 2022Online Meeting
[2A101]Dependence of Dissolution Kinetics of Main-Chain Scission Type Resists on Molecular Weight
*Akihiro Konda1, Hiroki Yamamoto2, Takahiro Kozawa1, Shusuke Yoshitake3(1. Osaka University, 2. National Institutes for Quantum Science and Technology, 3. NuFlare Technology Inc.)