ICSCRM2019
Sep 29 - Oct 4, 2019Kyoto International Conference Center
ICSCRM2019
Sep 29 - Oct 4, 2019Kyoto International Conference Center
[Mo-2A-02]Investigation of SiC Microwave Plasma Oxidation Kinetics via Oxygen Isotope Labelling
*Nannan You1,2, Shengkai Wang1,2, Jilong Hao1,2, Yun Bai1,2, Xinyu Liu1,2(1. Institute of Microelectronics of the Chinese Academy of Sciences(China), 2. University of Chinese Academy of Sciences(China))