[Mo-2B-04] Exploration of Solid Phase Epitaxy of 3C-SiC on Silicon | ICSCRM2019

ICSCRM2019

Sep 29 - Oct 4, 2019Kyoto International Conference Center

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ICSCRM2019

Sep 29 - Oct 4, 2019Kyoto International Conference Center

[Mo-2B-04]Exploration of Solid Phase Epitaxy of 3C-SiC on Silicon

*Marcin Zielinski¹, Sylvain Monnoye¹, Hugues Mank¹, Frank Torregrosa², Gregory Grosset², Yohann Spiegel², Marc Portail³, Adrien Michon³(1. NOVASiC(France), 2. IBS(France), 3. CNRS-CRHEA, UCA Univ.(France))

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