ICSCRM2019
Sep 29 - Oct 4, 2019Kyoto International Conference Center
ICSCRM2019
Sep 29 - Oct 4, 2019Kyoto International Conference Center
[Tu-1B-04]Analysis of Prismatic Dislocations in 4H-SiC Crystals by Multiple-beam Diffraction Topography
*Isaho Kamata1, Norihiro Hoshino1, Yuichiro Tokuda2, Takahiro Kanda2, Naohiro Sugiyama2, Hironari Kuno2, Hidekazu Tsuchida1(1. Central Res. Inst. of Electric Power Industry (CRIEPI)(Japan), 2. DENSO CORPORATION(Japan))