[Tu-2A-01(Invited)]Challenges in extremely low specific on-resistance with SiC SJ-VMOSFETs
*Takeyoshi Masuda1, Y. Saito1,2, T. Hatayama1, H. Michikoshi1, Y. Mikamura2, S. Harada1(1. National Institute of Advanced Industrial Science and Technology(Japan), 2. Sumitomo Electric Industries, Ltd(Japan))
