[Tu-2B-03] Growth and Characterization of Al-Doped p-type 4H-SiC Grown by PVT | ICSCRM2019

ICSCRM2019

Sep 29 - Oct 4, 2019Kyoto International Conference Center

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ICSCRM2019

Sep 29 - Oct 4, 2019Kyoto International Conference Center

[Tu-2B-03]Growth and Characterization of Al-Doped p-type 4H-SiC Grown by PVT

*Kazuma Eto¹, Hiromasa Suo^1,2, Tomohisa Kato¹, Hajime Okumura¹(1. National Institute of Advanced Industrial Science and Technology (AIST)(Japan), 2. Showa Denko K. K.(Japan))

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