[AMD5-4]Simulation Study of Self-Heating and Edge Effects on Oxide-Semiconductor TFTs: Channel-Width Dependence
*Katsumi Abe1, Kazuki Ota1, Takeshi Kuwagaki1(1. Silvaco Japan Co., Ltd. (Japan))
Keywords:
Oxide-semiconductor,Thin-film transistor,Self-heating,Edge effect,Device simulation
We studied the channel-width dependence of oxide-semiconductor TFTs via a device simulator. The results show that the ON-current is affected by two factors: self-heating and edge effects. The former increases the current with a rise in temperature, while the latter produces the high edge current-density caused by its strong electric-field.
