[AMDp2-14L]E/E Inverter Using Four-Terminal Poly-GexSn1-x TFTs on Glass
*Ryo Miyazaki1, Akito Hara1(1. Tohoku Gakuin University (Japan))
Keywords:
TFT,4T,poly-GeSn,Cu-MIC,E/E inverter
We demonstrated an E/E inverter using polycrystalline germanium-tin (poly-GexSn1-x) thin-film transistors (TFTs) fabricated via metal-induced crystallization (MIC) using Cu. The TFTs in the E/E inverter comprises a planar four-terminal (4T) structure, in which the TFTs were enabled to be normally-off by the control gate voltage (VCG). The inverter performance was varied by changing VCG.
