Proceedings of the International Display Workshops Volume 28 (IDW '21)

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Dec 1 - Dec 3, 2021Virtual Conference
The International Display Workshops
Proceedings of the International Display Workshops Volume 28 (IDW '21)

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Dec 1 - Dec 3, 2021Virtual Conference

[AMD2-2(Invited)]A Study on the Radiation Hardness of Amorphous Oxide Thin-Film Transistors

*Hyuck-In Kwon1, Min-Gyu Shin1, Seong-Hyun Hwang1, Kie Yatsu1(1.Chung-Ang University (Korea))
https://doi.org/10.36463/idw.2021.0136

Keywords:

AOS TFT,proton irradiation,radiation tolerance

We investigated the effects of film thickness (tch) on the radiation hardness of indium-gallium-tin oxide (IGTO) thin films transistors (TFTs). The IGTO TFT with the 12 nm thick channel layer exhibited the best electrical performance and radiation tolerance. The radiation tolerance significantly decreased as tch increased.