[FMC2-4L]Array of GaN Micro-LED Chips and Monocrystal Si CMOS Pixel Circuit Chips Mounted on Flexible Substrate
*Tetsuya Goto1, Takeshi Okuno2, Yoshikazu Suzuki2, Koichi Kajiyama2, Yoshihiko Muramoto3, Shigetoshi Sugawa1(1.Tohoku University (Japan), 2.V-Technology Co., Ltd. (Japan), 3.Nitride Semiconductors Co., Ltd. (Japan))
Keywords:
Micro-LED display,GaN,Monocrystal Si CMOS Circuit Chip,Laser Lift-off,Pulse-width modulation
This paper proposes new micro-LED display fabrication processes. GaN micro-LED and monocrystal Si CMOS chips with pixel circuit to drive LED are mounted in an array shape on a flexible substrate using laser lift-off processes. The emission intensity of LED could be successfully controlled by pulse-width modulation.
