Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14 - Dec 16, 2022Fukuoka International Congress Center
The International Display Workshops
Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14 - Dec 16, 2022Fukuoka International Congress Center

[AMD3-2]ZnON Thin Film and Its Impact on the IGZO Phototransistor

*Yuseong Jang1, Kyeong Soo Kang1, Soo-Yeon Lee1(1.Seoul National University (Korea))
https://doi.org/10.36463/idw.2022.0139

Keywords:

ZnON,Metal oxynitride,Reactive sputtering,InGaZnO (IGZO),Phototransistor

We fabricated IGZO/ZnON phototransistor by adopting in-situ deposition of IGZO and ZnON thin films. ZnON thin film, deposited using ZnO ceramic target, successfully enhanced the recombination of VO2+ states in IGZO so that negligible persistent photoconductivity (PPC) effect was achieved.