[AMD3-2]ZnON Thin Film and Its Impact on the IGZO Phototransistor
*Yuseong Jang1, Kyeong Soo Kang1, Soo-Yeon Lee1(1.Seoul National University (Korea))
Keywords:
ZnON,Metal oxynitride,Reactive sputtering,InGaZnO (IGZO),Phototransistor
We fabricated IGZO/ZnON phototransistor by adopting in-situ deposition of IGZO and ZnON thin films. ZnON thin film, deposited using ZnO ceramic target, successfully enhanced the recombination of VO2+ states in IGZO so that negligible persistent photoconductivity (PPC) effect was achieved.