[FMC5-2] Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode | Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14 - Dec 16, 2022Fukuoka International Congress Center

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Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14 - Dec 16, 2022Fukuoka International Congress Center

[FMC5-2]Silicon Thin Film Crystallization Annealing System Using Blue Laser Diode

*Yingbao Yang¹, Seiya Toriyama¹, Masahiro Kinoshita¹, Kaoru Saito¹, Takuya Sawai¹, Junichi Koshigi¹, Jun Gotoh¹, Shigeto Sugimoto¹, Jingbao Yao, Rui Zhao, Jinming Li, Shouqing Chen(1.V Technology Co., Ltd (Japan))

https://doi.org/10.36463/idw.2022.0287

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Keywords:

Blaue Laser Diode,BLDA,Optical Fiber,Lateral-Growth,Single Crystal

A new silicon-crystallization-annealing system using blue laser diode (BLDA) has been developed. By a redundant fiber-array arrangement, annealing of different pixel pitch can be implemented. Low off current and high mobility about 300cm²/VS has been confirmed in the TFT device by BLDA.

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