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LED Illumination System Used in FPD Exposure Tools

We developed illumination system using light emitting diode (LED) for flat panel display (FPD) exposure tools. The system can be used on Canon's FPD exposure tools by replacing some parts of its illumination system. Our new system improves productivity of FPD manufacturing.

The International Display Workshops

Proceedings of the International Display Workshops Volume 30 (IDW '23)

Proceedings of the International Display Workshops Volume 30 (IDW '23)

[FMCp2-5]LED Illumination System Used in FPD Exposure Tools

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