[FMCp2-6] Laser Crystallization of Amorphous Silicon via Spot Beam Annealing Method | Proceedings of the International Display Workshops Volume 30 (IDW '23)

Proceedings of the International Display Workshops Volume 30 (IDW '23)

Dec 6 - Dec 8, 2023TOKI MESSE Niigata Convention Center

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Proceedings of the International Display Workshops Volume 30 (IDW '23)

Dec 6 - Dec 8, 2023TOKI MESSE Niigata Convention Center

[FMCp2-6]Laser Crystallization of Amorphous Silicon via Spot Beam Annealing Method

*JinNyoung Jang¹, Won Hee Han², Gi Hyeon Baek², Jayoung Park³, James Im³, Chiwoo Kim²(1. APS Research (Korea), 2. APS Inc. (Korea), 3. Columbia University (United States of America))

https://doi.org/10.36463/idw.2023.0437

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Keywords:

LTPS,Spot Beam Annealing,Laser

Polygon-based optical system is a crucial component in spot beam annealing, providing precise control over the laser spot position and achieving high linear velocities. Crystallization tests involve power and spot overlap evaluations, AFM measurements, and Raman/SEM analysis to optimize the process parameters and understand the spot-beam annealing mechanism. This paper presents the system configuration and experimental results for spot beam annealing in low-temperature polysilicon ...

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