[AMD4] Oxide TFT (3)

2:10 PM - 2:30 PM JST(5:10 AM - 5:30 AM UTC)

[AMD4-3] Channel Deposition Engineering of Novel a-IGZO TFT with ALD Process

*Chen Gu^1,2, Chuanke Chen^1,2, Chunyu Zhang^1,2, Ziheng Bai¹, Di Geng^1,2 (1. Chinese Academy of Sciences (China), 2. University of Chinese Academy of Sciences (China))

Keywords:

ALD,a-IGZO TFT,high mobility