[AMD4-4L]High Mobility Polycrystalline Oxide Thin Film Transistors for 12.6 inch AMOLED Display
*Xue Liu1, Qidi Liu1, Guowen Yan4, Mengsen Wang1, Xuyang Zhang1, Yinghai Ma1, Fa-Hsyang Chen2, Wangfeng Xi3, Rubo Xing2, Xiujian Zhu2(1. Yungu (Gu'an) Technology Co.,Ltd. (China), 2. Kunshan Govisionox Optoelectronics Co., Ltd. (China), 3. Jiangsu Huixian Display Technology Co., Ltd. (China), 4. Hefei Visionox Technology Co.,Ltd. (China))
Keywords:
Polycrystalline,oxide thin film transistor,high mobility
A high mobility polycrystalline oxide thin film transistors has been fabricated on the Gen. 4.5 glass substrate. The device shows high field-effect mobility (μFE)~44 cm2 /Vs with threshold voltage (Vth) of 0.07V, the device shows a good uniformity and reliability, Vth shift positively around 1V under positive bias temperature stress of 12h, 12.6 inch AMOLED panel shows a good display uniformity.