[AMD5/FMC7] Oxide TFT Manufacturing Technology

9:00 AM - 9:20 AM JST(12:00 AM - 12:20 AM UTC)Invited

[AMD5/FMC7-1(Invited)] Fluorination Technology for Reliable Metal-Oxide Thin-Film Transistors

Man Wong¹, *Wei Jiang¹ (1. The Hong Kong University of Science and Technology (China))

Keywords:

thin-film transistor,metal oxide semiconductor,,fluorination,indium-gallium-zinc oxide

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