[AMD5/FMC7] Oxide TFT Manufacturing Technology

9:40 AM - 10:00 AM JST(12:40 AM - 1:00 AM UTC)

[AMD5/FMC7-3] Top-Gate IGZO TFT With Dry Etching Process for High-Resolution Display Application

*Zhang Chunyu^1,2, Chen Chuanke^1,2 (1. IMECAS (China), 2. University of Chinese Academy of Sciences (China))

Keywords:

IGZO TFT,Dry etching,NBS