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Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO2 and SiNx films for TFTs ~

Oxide TFT Manufacturing Technology

The 31st International Display Workshops (IDW '24)

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[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO₂ and SiN_x films for TFTs ~

Keywords:

Presentation Information

[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO2 and SiNx films for TFTs ~

Keywords:

[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO₂ and SiN_x films for TFTs ~