bn-home.png

IDWHP

bn-register.png

registration

bn-spevent.png

spevent

IDW website

General Information

Registration

Announcements(0)

Timetable

Tue. Dec 3, 2024

Wed. Dec 4, 2024

Thu. Dec 5, 2024

Fri. Dec 6, 2024

Program

Keynote Address

Special Topics of Interest

Topical Sessions and Workshops

Special Events

Sessions

Search presentations

IDW24-confitR1.png

web_icon.png

Profile management

Bookmark

Announcements

Download PDF for print

Special Topics

Program Type

Presentation Category

Change account information such as the email address and password on the account setting screen common to Confit.

Log in to make the most of the service, such as bookmark registration.

Login required to view

Password required to view

Presentation Information

Session Details

To browse or post comments, you must log in.

You cannot post comments as it is outside the comment posting period.

This comment has been deleted. You cannot reply to this comment.

Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO<sub>2</sub> and SiN<sub>x</sub> films for TFTs ~

Oxide TFT Manufacturing Technology

The 31st International Display Workshops (IDW '24)

Presentation Information

[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO₂ and SiN_x films for TFTs ~

Keywords:

Presentation Information

[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO2 and SiNx films for TFTs ~

Keywords:

[AMD5/FMC7-4L]Highly Reliable Hydrogen-Free Top-Gate Oxide TFT ~ Hydrogen-Free ICP-CVD SiO₂ and SiN_x films for TFTs ~