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UV-Photopatterned High-k Polymer Films for Flexible Electronic Devices

A novel high-k Parylene-OH thin film is developed via chemical vapor deposition process, offering flexibility, UV photo-patterning, and high dielectric constant of 7.53. It enables flexible IGZO TFTs and CMOS inverters, promising future applications in advanced flexible electronics.

The International Display Workshops

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

[AMDp1-2L]UV-Photopatterned High-k Polymer Films for Flexible Electronic Devices

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