Presentation Information

[AMDp1-6L]Ultra-Thin Indium Oxide Thin-Film Transistors by Plasma Enhanced Atomic Layer Deposition

*Jaewon Park1, Seong Cheol Jang1, Hyun-Suk Kim1 (1. Dongguk University (Korea))

Keywords:

thin-film transistors,amorphous oxide semiconductors,scale down,atomic layer deposition,indium oxide