Presentation Information
[AMDp1-6L]Ultra-Thin Indium Oxide Thin-Film Transistors by Plasma Enhanced Atomic Layer Deposition
*Jaewon Park1, Seong Cheol Jang1, Hyun-Suk Kim1 (1. Dongguk University (Korea))
Keywords:
thin-film transistors,amorphous oxide semiconductors,scale down,atomic layer deposition,indium oxide