[AMDp2-4]The Improvement of Amorphous Silicon Thin Film Transistor Photosensitivity for Optical Sensor
*Hejing Zhang1, Chunyan Lin1, Junlong Fan1, Zhen Liu1, An-thung Cho1, James Hsu1, Wade Chen1(1. Chongqing HKC Optoelectronics Technology Co., Ltd. (China))
Keywords:
optical sensor,a-Si TFT,top gate driven,gap-gate TFT structure,photosensitive current
Different gate driven a-Si:H TFTs and various gap-gate a-Si:H TFT structures were proposed and measured under different illuminance intensities for optical sensors, processes of which were completely compatible with existing LCD VA-TFT arrays in this paper. The top gate driven TFT showed higher Iphoto/Idark ratio as high as 1.70×107, and the novel gap-gate TFT structure expressed lower off current.