Presentation Information
[AMDp2-6]Bias Stress Reliability of ALD InGaZnO TFTs With HfOx
*Ziheng Bai1, Chunyu Zhang1, Nannan You1, Haitao Zhou1, Jiayi Wang1, Di Geng1 (1. Institute of Microelectronics of Chinese Academy of Sciences (China))
Keywords:
InGaZnO,TFT,Bias stress
Password required to view
To view or download the proceedings, please log into your Confit account using the "Log in" button.
If you do not have a Confit account, enter the password provided by the IDW Secretariat in the designated box and click the "Authenticate" button.
If you do not have a Confit account, enter the password provided by the IDW Secretariat in the designated box and click the "Authenticate" button.
orLog in
Comment
To browse or post comments, you must log in.Log in