[AMDp2] Active-Matrix Device (2)

[AMDp2-6] Bias Stress Reliability of ALD InGaZnO TFTs With HfOx

*Ziheng Bai¹, Chunyu Zhang¹, Nannan You¹, Haitao Zhou¹, Jiayi Wang¹, Di Geng¹ (1. Institute of Microelectronics of Chinese Academy of Sciences (China))

Keywords:

InGaZnO,TFT,Bias stress