Presentation Information
[AMDp2-6]Bias Stress Reliability of ALD InGaZnO TFTs With HfOx
*Ziheng Bai1, Chunyu Zhang1, Nannan You1, Haitao Zhou1, Jiayi Wang1, Di Geng1 (1. Institute of Microelectronics of Chinese Academy of Sciences (China))
Keywords:
InGaZnO,TFT,Bias stress
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