Presentation Information
[FLX3-4L]Strain Effects on Polycrystalline Germanium Thin Films for Strain Transistors
*Kota Igura1, Koki Nozawa1, Takashi Suemasu1, Kaoru Toko1 (1. University of Tsukuba (Japan))
Keywords:
semiconductor,thin films,solid-phase crystallization,strain