Presentation Information

[FLX3-4L]Strain Effects on Polycrystalline Germanium Thin Films for Strain Transistors

*Kota Igura1, Koki Nozawa1, Takashi Suemasu1, Kaoru Toko1 (1. University of Tsukuba (Japan))

Keywords:

semiconductor,thin films,solid-phase crystallization,strain

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