[FLX4] Advanced Processes and Materials for Flexible Devices (1)

9:20 AM - 9:40 AM JST(12:20 AM - 12:40 AM UTC)

[FLX4-2] Low-Temperature Fabrication Process for IGZO-TFTs in Future Roll-to-Roll Manufacturing

*Tsukasa Kishiume¹, Takao Kokubun¹, Masakazu Hori¹, Masayoshi Fuchi¹, Yoshiaki Kito¹, Makoto Nakazumi¹ (1. Nikon Corporation (Japan))

Keywords:

a-IGZO,Oxide Semiconductor,Roll to Roll,Flexible,OLED