[FMC9/OLED7-2(Invited)]Solution-Processed Ultra-High Barrier Film for Organic Electronics Through Vacuum UV Irradiation
*He Sun1, Luyang Song1, Yoshiyuki Suzuri1(1. Yamagata University (Japan))
Keywords:
moisture barrier,VUV photo-chemical reaction & densification,solution processed SiNx film
Our research demonstrates that solution-processed SiNx barrier films, optimized with PHPS and PDMS layers and enhanced by VUV irradiation, can rapidly achieve ultrahigh barrier performance of up to 1.6 x 10-5 g m-2 day-1, making them suitable for industrial production of advanced organic electronic devices.