[FMCp1] Materials and Components

[FMCp1-3] High-UV-Transmittable Black Pigment for Advanced Black Resist Processing

*Hiroto Akaike¹, Naoyuki Aiba², Shozo Komiyama², Kensuke Kageyama² (1. Mitsubishi Materials Corporation (Japan), 2. Mitsubishi Materials Electronic Chemicals Co.,Ltd (Japan))

Keywords:

Black pigments,Black resist,Photolithography