[FMCp2] Manufacturing and Process

[FMCp2-1] A Metal for Making Different Cu Taper in Etching Fluid

*Hui Wang¹, Kang Long¹, Zhihui Song¹, HuiHua Liao¹, Huang I. Chen¹, James Hsu¹, Wade Chen¹ (1. Changsha HKC Optoelectronics Technology Co.,Ltd (China))

Keywords:

different Cu taper,metal1&2short,Dark line ratio,metal breakage and residue