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A Metal for Making Different Cu Taper in Etching Fluid

In this paper, the method of producing different taper in the same etching solution of two layers of metal in the copper process of TFT-LCD is reported.

The International Display Workshops

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

[FMCp2-1]A Metal for Making Different Cu Taper in Etching Fluid

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