[FMCp2-2]Electrical Properties of ZTO Thin-Film Transistor Coated with Air Spray Printing for Active Layer Formation
*Young Jik Lee1, Yong-Jae Kim1, Woon-Seop Choi1(1. Hoseo University (Korea))
Keywords:
spray deposition,semiconducting,ZTO,TFT
ZTO is a suitable material for oxide semiconductor TFTs. Air spray technology reduces waste because it uses only the solution needed to form a thin film, and has the advantages of low cost, high throughput, and mass production potential. Compared with spin coating, ZTO TFTs fabricated by air spraying showed much better performance than spin coated ZTO TFT.