Proceedings of the International Display Workshops Volume 31 (IDW '24)
Dec 4 - Dec 6, 2024Sapporo Convention Center
Proceedings of the International Display Workshops Volume 31 (IDW '24)
Dec 4 - Dec 6, 2024Sapporo Convention Center
[FMCp2-3]ITO Film Detection and Improvement for Liquid
*Longjin Zhou1, Sudi Rao1, Chengyi Huang1, James Hsu1, Wade Chen1(1. Changsha HKC Optoelectronics Technology Co. (China))
Keywords:
ITO,Liquid crystal display,Crack reduction
In this paper, the quality of ITO films under different process conditions was evaluated from different angles.ITO film was excited at high temperature, soaked in the stripping solution, and hardness test was carried out.The variation law of film quality was summarized from the influence of different process conditions and the roughness of the bottom film, and the feasibility of hardness as a test method for ITO film quality was discussed.