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Research on Profile of Al/Mo Electrode

Al/Mo structural metals are used as gate electrodes for TFTs, and clarifying the influence of process parameters on the metal profile angle and its Impedance is crucial for product design and production. In this paper, the effects of the film layer structure, photolithography process, and wet etching process on the metal profile angle and Impedance are investigated.

The International Display Workshops

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

[FMCp2-5]Research on Profile of Al/Mo Electrode

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