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Fabrication of Shape-Controllable Nanostructures Using Laser Interference Lithography

A periodic nanostructure of various shapes was fabricated by laser interference lithography. The nanostructure can be easily fabricated through a low-power continuous-wave laser. Furthermore, we demonstrated that the shape of the nanostructures can be controlled by adjusting the process parameter optimization.

The International Display Workshops

Proceedings of the International Display Workshops Volume 31 (IDW '24)

Proceedings of the International Display Workshops Volume 31 (IDW '24)

[FMCp2-6]Fabrication of Shape-Controllable Nanostructures Using Laser Interference Lithography

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